Ibisobanuro:
Izina | Dioxyde ya Silicon / Silika / Okiside ya Silicon Nanopowders |
Inzira | SiO2 |
Andika | Hydrophobique, hydrophilique |
Ingano ya Particle | 20nm |
Isuku | 99.8% |
Kugaragara | Ifu yera |
Amapaki | 20kg / 30kg kuri buri mufuka / ingunguru |
Ibishoboka | Gupfundikanya amazi, gusiga, reberi, ceramic, beto, irangi, kwisukura, antibacterial, catalizator, binder, amavuta, nibindi .. |
Ibisobanuro:
Kuki silicon dioxide nano ifu ishobora gukoreshwa kuri CMP?
Nano-silika ifite igiciro gito ugereranije, kandi ikwirakwizwa ryiza, gukuramo imashini, imbaraga nyinshi hamwe no gufatira hamwe, gukora firime nziza, kwinjirira neza, ikirere cyinshi no kwihanganira kwambara, ingano ntoya, gukomera.Ifite kandi ibyiza byo kugereranya, kutagira ubukonje buke, gufatira hasi, no gukora isuku byoroshye nyuma yo gusya.Nibikoresho byo gusya kubijyanye na tekinoroji ya CMP nibikorwa byiza.
SiO2 nano agace gakunze gukoreshwa mugutunganya neza ibyuma, safiro, silikoni ya monocrystalline, ibirahuri-ceramika, umuyoboro uyobora urumuri nubundi buso.Ingano ya okiside ya nano silicon iri munsi ya 100nm, ifite ubuso bunini bwihariye, butandukanijwe cyane kandi bworoshye, bityo ibyangiritse ku buso bwibikorwa bisizwe ni bito cyane;mubyongeyeho, ubukana bwa silika nanoparticle isa nubwa wafer ya silicon.Kubwibyo, irakoreshwa kandi mugukonjesha semiconductor silicon wafers.
Ibyiza bya nano SiO2 ifu muri progaramu ya CMP:
1. Gusiga ni ugukoresha nanoparticles imwe ya SiO2 nibindi bikoresho, bitazatera kwangirika kwumubiri kubice byatunganijwe, kandi umuvuduko urihuta.Gukoresha uduce duto nka siloidal silika hamwe nubunini bunini kandi bunini burashobora kugera ku ntego yo kwihuta cyane.
2. Ntabwo yangiza ibikoresho kandi ifite umutekano muke.
3. Kugera kumurongo wo hejuru wo gusya.
4. Kugabanya neza ibishushanyo byo hejuru nyuma yo gusya no kugabanya ubukana bwubuso nyuma yo guswera.
Imiterere y'Ububiko:
Dioxyde ya Silicon (SiO2) nanopowders igomba kubikwa mu kashe, irinde urumuri, ahantu humye.Kubika ubushyuhe bwicyumba ni sawa.
SEM: