Tlhaloso:
Khoutu | L560 |
Lebitso | Phofo ea Silicon Nitride |
Foromo | Si3N4 |
Nomoro ea CAS. | 12033-89-5 |
Boholo ba Karolo | 0.3-0.5um |
Bohloeki | 99.9% kapa 99.99% |
Mofuta oa Crystal | Alpha |
Ponahalo | Tloha phofo e tšoeu |
Sephutheloana | 1kg kapa kamoo ho hlokahalang |
Lisebelisoa tse ka bang teng | E sebelisoa e le moemeli oa ho lokolla hlobo bakeng sa silicon ea polycrystalline le crucible e le 'ngoe ea crystal silicon quartz; e sebelisoa e le lisebelisoa tse tsoetseng pele tsa refractory; e sebelisoang lifiliming tse tšesaane tsa lisele tsa letsatsi; etc. |
Tlhaloso:
Si3N4 ke mofuta o mocha oa thepa ea ceramic e nang le mocheso o phahameng o nang le lik'hemik'hale tse ntle haholo, ho hanyetsa mocheso o tlase, ho theoha ha mocheso o tlase, ho se kolobise ka mefuta e fapaneng ea tšepe e sa tsitsang, boima bo phahameng, ho itšehla thajana, e 'nile ea sebelisoa ho pharaletseng. lisebelisoa tsa ho seha, metallurgy, bofofisi, lik'hemik'hale le liindasteri tse ling.
Silicon nitride e ka boela ea sebelisoa ho lisele tsa letsatsi tse tšesaane tsa filimi. Ka mor'a hore filimi ea silicon nitride e phahamisoe ke mokhoa oa PECVD, eseng feela ho bonahatsa leseli la ketsahalo ho ka fokotsoa, empa hape, ts'ebetsong ea filimi ea silicon nitride, liathomo tsa hydrogen tsa sehlahisoa sa karabelo li kena filimi ea silicon nitride le silicon wafer to passivate/ Karolo ya bofokodi.
Boemo ba polokelo:
Silicon Nitride Powder e lokela ho bolokoa sebakeng se tiisitsoeng, qoba sebaka se bobebe, se omileng. Ho boloka mocheso oa kamore ho lokile.
SEM: